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VM&EHM (Virtual Metrology & Equipment Health Management)

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  • VM&EHM (Virtual Metrology & Equipment Health Management)

Intelligent Big Data Engine Platform

Centered on combining intelligent algorithms with engineering methodologies to offset gaps in personnel experience, the Intelligent Big Data Engine Platform applies to numerous scenarios including equipment anomaly investigations, quality defect root-cause analysis, and parameter optimization.
Core system modules include: FDC, YMS, VM & EHM, BDP, DMS, BI, and APC/R2R.

VM&EHM
(Virtual Metrology & Equipment Health Management)

The VM system is an AI-driven software solution designed to predict product characteristics (such as film thickness, impedance, and line width) by combining equipment and process parameters with statistical and machine learning models.

Product Advantages

Supporting mature industrial algorithms such as RF, XGBoost, and PLS, ensuring models are explainable and verifiable.

Natively interfacing with MES, FDC, EAP, and YMS without altering existing line architectures.

Supporting automatic model retraining and version management for long-term operation without relying on manual expert maintenance.