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APC/R2R (Advanced Process Control / Run-to-Run)

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  • APC/R2R (Advanced Process Control / Run-to-Run)

Intelligent Big Data Engine Platform

Centered on combining intelligent algorithms with engineering methodologies to offset gaps in personnel experience, the Intelligent Big Data Engine Platform applies to numerous scenarios including equipment anomaly investigations, quality defect root-cause analysis, and parameter optimization.
Core system modules include: FDC, YMS, VM & EHM, BDP, DMS, BI, and APC/R2R.

APC/R2R
(Advanced Process Control / Run-to-Run)

APC/R2R (Advanced Process Control / Run-to-Run) supports semiconductor process-engineering teams working on process control and parameter optimization. It forms part of the Intelligent Big Data Engine Platform and is designed for use across diverse semiconductor manufacturing processes.

A modular design supports deployment according to current needs and step-by-step expansion. Standardized APIs allow client-side secondary development and integration, helping engineering teams incorporate process-control capabilities into their existing manufacturing environment.

Product Advantages

Modular design allowing on-demand deployment and step-by-step expansion.

Providing standardized APIs to support client secondary development.

Compatible with diverse semiconductor manufacturing processes.